Deposition and analysis of lithium niobate and other lithium niobium oxides by rf magnetron sputtering

Journal of Applied Physics

Volumn 72, Issue 9, 1992, Pages 4336-4343

  Rost, Timothy A ^a   Lin, He ^a   Rabson, Thomas A ^a   Baumann, Robert C ^b   Callahan, Daniel L ^a  

^a RICE UNIVERSITY   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000014136     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.352197     Document Type: Article

References (31)